On-Line Displacement Measurement System Based on Multiplexed Optical Fiber Mach-Zenhder Heterodyne Interferometry

WANG Yunzhi1 XIE Fang1 CHEN Longhui1 XU Haibo1 LI Mingjia1

(1.Laboratory of Opto-Electronic Information Science and Engineering, Department of Physics, School of Science, Beijing Jiaotong University, Beijing, China 100044)

【Abstract】A multiplexed optical fiber Mach-Zenhder heterodyne interferometric system which is suitable for on-line displacement measurement is researched. Based on the characteristic that fiber Bragg grating only reflects Bragg wavelength, two independent optical fiber Mach-Zenhder interferometers which possess almost the same optical path are established. One of the optical fiber Mach-Zenhder interferometers is used to perform the measurement task, while the other one is used to monitor the environmental disturbances. The system is suitable for on-line measurement after the environmental disturbances are compensated. The acoustic optical modulators embedded in the reference arm of the interferometers shift the frequency of the reference beam, and heterodyne interferometric signals are formed when the reference beam meets the measurement beam, realizing heterodyne interferometric measurement. During the experiments, the standard deviation of 10 repeated measurements for 100 μm displacement is 6 nm.

【Keywords】 measurement; optical fiber sensing; on-line measurement; heterodyne interferometric measurement; displacement measurement;

【DOI】

【Funds】 Natural Science Foundation of Beijing (3172024)

Download this article

(Translated by CAI ZJ)

    References

    [1] Chang C P, Tung P C, Shyu L H, et al. Fabry-Perot displacement interferometer for the measuring range up to 100 mm [J]. Measurement, 2013, 46 (10): 4094–4099.

    [2] Wang C, Xu L L, Zhu J, et al. A novel integrated fiber-optic interferometer model and its application in micro-displacement measurement [J]. Optics and Lasers in Engineering, 2016, 86: 125–131.

    [3] Guan K S, Li Y H, Chen Y X, et al. A novel optical fiber displacement measurement system [J]. Applied Mechanics and Materials, 2014, 599/600/601: 684–688.

    [4] Manojlovic L M. A novel common path interferometric technique for vibration measurement based on two fiber-optic couplers [J]. IEEE Sensors Journal, 2011, 11 (7): 1541–1547.

    [5] Seat C, Ouisse E, Morteau E, et al. Vibration displacement measurements based on a polarimetric extrinsic fibre Fabry Perot interferometer [J]. Measurement Science and Technology, 2003, 14 (6): 710–716.

    [6] Meggitt B T, Hall C J, Weir K. An all fibre white light interferometric strain measurement system [J]. Sensors and Actuators A: Physical, 2000, 79 (1): 1–7.

    [7] Wang W H, Wu N, Tian Y, et al. Miniature all-silica optical fiber pressure sensor with an ultrathin uniform diaphragm [J]. Optics Express, 2010, 18 (9): 9006–9014.

    [8] Ohta T, Koshimizu C, Kawasaki K, et al. Simultaneous measurement of substrate temperature and thin-film thickness on SiO2/Si wafer using optical-fiber-type low-coherence interferometry [J]. Journal of Applied Physics, 2009, 105 (1): 013110.

    [9] Xavier G B, von der Weid J P. Stable single-photon interference in a 1 km fiber-optic Mach-Zehnder interferometer with continuous phase adjustment [J]. Optics Letters, 2011, 36 (10): 1764–1766.

    [10] Fritsch K, Adamovsky G. Simple circuit for feedback stabilization of a single-mode optical fiber interferometer [J]. Review of Scientific Instruments, 1981, 52 (7): 996–1000.

This Article

ISSN:0258-7025

CN: 31-1339/TN

Vol 46, No. 09, Pages 194-198

September 2019

Downloads:2

Share
Article Outline

Abstract

  • 1 Introduction
  • 2 Principle of on-line displacement measurement system based on multiplexed optical fiber Mach-Zehnder heterodyne interferometry
  • 3 Displacement measurement and discussion
  • 4 Conclusions
  • References