Dynamic Twyman Interferometer for Phase Defect Measurement

MA Yun1 CHEN Lei2 ZHU Wenhua2 LIU Yiming2 LI Jianxin2

(1.Advanced Launch Corporative Innovation Center, Nanjing University of Science and Technology, Nanjing, Jiangsu, China 210094)
(2.School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu, China 210094)

【Abstract】In order to realize the large field, high resolution and dynamic measurement of optical component phase defects, we design a dynamic Twyman interferometer. Based on low-coherence laser and Michelson interferometer, a pair of orthogonal polarized light produced with phase delay is used as light source. By phase matching of the interference cavity, the phase delay between reference light and test light is compensated. The polarization camera is used to collect four interferograms with phase-shifting step of π/2, and the information of the phase defect is solved by phase-shifting algorithm. The effect of secondary diffraction on measurement results is analyzed based on the theory of the angle spectrum of plane wave. The influence of the polarizer error on the measurement results is analyzed by Jones matrix method. In the experiment, a laser-damaged optical plate is measured by this interferometer and Veeco NT9100 white light interferometer, and the relative error is 2.4%. In addition, this method is used to detect phase defects of optical flat in high power laser system, and the peak-to-valley value of wavefront is 199.2 nm. The results show that the interferometer can be used to detect phase defects of optical components, effectively.

【Keywords】 measurement; dynamic interferometry; phase defect; spatial phase-shifting; low-coherence light source;

【DOI】

【Funds】 National Natural Science Foundation of China (61505082, U1731115) Natural Science Foundation of Jiangsu Province (SBK2015041354) Open Fund of Key Laboratory of Ministry of Industry and Information Technology for Advanced Solid State Laser Technology (30916014112-003)

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This Article

ISSN:0258-7025

CN: 31-1339/TN

Vol 44, No. 12, Pages 206-213

December 2017

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Article Outline

Abstract

  • 1 Introduction
  • 2 Principle of low-coherence dynamic Twyman interferometer
  • 3 Experiment
  • 4 Discussion
  • 5 Conclusion
  • References