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## 激光传感器光轴垂直度误差标定方法

(1.天津大学精密测试技术及仪器国家重点实验室, 天津 300072)
(2.中国计量科学研究院, 北京 100013)

【摘要】针对高精度复合式测量机中的激光传感器进行了高精度的标定, 提出了利用已知底角的双斜面标定块和正弦定理标定光轴垂直度误差偏角的方法, 分析了影响标定精度的因素。该方法避免了传感器光轴与工作台不垂直引入的各个方向的误差, 可有效地提高该传感器的测量精度, 为更高精度的多传感器复合测量提供了基础。

【关键词】 传感器;垂直度误差标定;拟合平面斜率;光轴;高精度复合式测量;

【DOI】

【基金资助】 国家重大科学仪器设备开发专项 (2013YQ17053903) ;

## Calibration Method for Optical Axis Perpendicular Error of Laser Sensor

Wang Yiwen1 Fu Luhua1 Zhao Yan1 Zhang Heng2 Qu Xinghua1 Liu Changjie1

(1.State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin, China 300072)
(2.National Institute of Metrology of China, Beijing, China 100013)

【Abstract】The high-precision calibration of laser sensors in high-precision composite measuring machines is conducted. The calibration method of the optical axis perpendicular error angle by using the calibration block of double slopes with known base angles and the sine theorem is proposed. This method can avoid the errors from various directions caused by the non-perpendicular orientation between the optical axis of sensors and the worktable, which can effectively improve the measurement accuracy of this sensor and provide a basis for multi-sensor duplex measurement with higher accuracy.

【Keywords】 sensors; calibration of perpendicular error; fitted plane slope; optical axis; high-precision complex measurement;

【DOI】

【Funds】 National Key Foundation for Exploring Scientific Instrument Program (2013YQ17053903) ;

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ISSN:0258-7025

CN: 31-1339/TN

Vol 44, No. 04, Pages 224-233

April 2017

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