Design of piezo-driven micro-positioning platform with cascaded rhombus displacement magnifying mechanism

XU Fangchao1 WEI Hengzhi1 SUN Feng1 LU He2 LI Qiang1

(1.School of Mechanical Engineering, Shenyang University of Technology, Shenyang, Liaoning Province, China 110870)
(2.Shenyang Aerospace Xinle Limited Liability Company, Shenyang, Liaoning Province, China 110870)

【Abstract】In terms of the large size and small stroke of a two-dimensional micro-positioning platform, a nested two-dimensional piezo-driven micro-positioning platform adopting cascaded rhombus displacement magnifying mechanism is designed. The structure and working principle of the micro-positioning platform is introduced. The mechanical model of the micro-positioning platform is established, and the effects of its structure parameters on the amplification ratio are investigated. The static characteristic analysis of the micro-positioning platform with the cascaded rhombus displacement magnifying mechanism is carried out. The relationships between the driving force and output displacement of the micro-positioning platform are investigated, and the comparisons between theoretical results and simulation results are made. The output displacement characteristics of the micro-positioning platform are tested. The dynamic characteristic analysis of the micro-positioning platform is carried out, and the dynamic model of the micro-positioning platform is established. The closed-loop step response of the micro-positioning platform is studied, and the comparisons between simulation results and testing results are made. The closed-loop minimum displacement resolution and the repetitive positioning accuracy of the micro-positioning platform are analyzed by testing, and the offset error of the micro-positioning platform in two directions is analyzed. The experimental results show that the piezo-driven micro-positioning platform with the cascaded rhombus displacement magnifying mechanism has the characteristics of large stroke, small volume, and high precision.

【Keywords】 micro-positioning platform; cascaded rhombus displacement magnifying mechanism; large stroke; piezo-driven;

【Funds】 National Natural Science Foundation of China (51105257, 51310105025) Innovative Talents Support Plan for Colleges and Universities in Liaoning Province, China (LR2017036) PhD Start-Up Fund of Liaoning Province, China (20170520177) Liaoning Talents Engineering (2015-47)

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This Article

ISSN:0254-3087

CN: 11-2179/TH

Vol 40, No. 01, Pages 52-61

January 2019

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Article Outline

Abstract

  • 0 Introduction
  • 1 Structure and motion principle of micro-positioning platform
  • 2 Establishment of mathematical model
  • 3 Analysis of static characteristics
  • 4 Analysis of dynamic characteristics
  • 5 Precision analysis of micro-positioning platform with cascaded rhombus displacement magnifying mechanism
  • 6 Conclusions
  • References