Design of piezo-driven micro-positioning platform with cascaded rhombus displacement magnifying mechanism
(2.Shenyang Aerospace Xinle Limited Liability Company, Shenyang, Liaoning Province, China 110870)
【Abstract】In terms of the large size and small stroke of a two-dimensional micro-positioning platform, a nested two-dimensional piezo-driven micro-positioning platform adopting cascaded rhombus displacement magnifying mechanism is designed. The structure and working principle of the micro-positioning platform is introduced. The mechanical model of the micro-positioning platform is established, and the effects of its structure parameters on the amplification ratio are investigated. The static characteristic analysis of the micro-positioning platform with the cascaded rhombus displacement magnifying mechanism is carried out. The relationships between the driving force and output displacement of the micro-positioning platform are investigated, and the comparisons between theoretical results and simulation results are made. The output displacement characteristics of the micro-positioning platform are tested. The dynamic characteristic analysis of the micro-positioning platform is carried out, and the dynamic model of the micro-positioning platform is established. The closed-loop step response of the micro-positioning platform is studied, and the comparisons between simulation results and testing results are made. The closed-loop minimum displacement resolution and the repetitive positioning accuracy of the micro-positioning platform are analyzed by testing, and the offset error of the micro-positioning platform in two directions is analyzed. The experimental results show that the piezo-driven micro-positioning platform with the cascaded rhombus displacement magnifying mechanism has the characteristics of large stroke, small volume, and high precision.
【Keywords】 micro-positioning platform; cascaded rhombus displacement magnifying mechanism; large stroke; piezo-driven;
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