激光传感器光轴垂直度误差标定方法

王祎雯1 付鲁华1 赵炎1 张恒2 曲兴华1 刘常杰1

(1.天津大学精密测试技术及仪器国家重点实验室, 天津 300072)
(2.中国计量科学研究院, 北京 100013)

【摘要】针对高精度复合式测量机中的激光传感器进行了高精度的标定, 提出了利用已知底角的双斜面标定块和正弦定理标定光轴垂直度误差偏角的方法, 分析了影响标定精度的因素。该方法避免了传感器光轴与工作台不垂直引入的各个方向的误差, 可有效地提高该传感器的测量精度, 为更高精度的多传感器复合测量提供了基础。

【关键词】 传感器; 垂直度误差标定; 拟合平面斜率; 光轴; 高精度复合式测量;

【DOI】

【基金资助】 国家重大科学仪器设备开发专项 (2013YQ17053903)

Download this article

    References

    [1]Singh P, Wu Y, Kaucic R, et al.Multimodal industrial inspection and analysis[J].Journal of Computing&Information Science in Engineering, 2007, 7 (1) :102-107.

    [2]Waurzyniak P.Multisensor systems ramp up-Faster processors, improved accuracy spur multisensor adoption[J].Manufacturing Engineering, 2003, 130 (6) :61-68.

    [3]Yang Xingang, HuangYumei, Gao Feng, et al.Research on calibration algorithm of analogue touch probe with nonorthogonal coordinate system[J].Chinese Journal of Scientific Instrument, 2007, 28 (10) :1826-1830.

    [4]朱从贵, 黄明强.坐标测量机上标准球的校准[J].上海计量测试, 1995 (5) :25-27.

    [5]罗政.三维触发式测头的标定与正确使用[J].工具技术, 1992 (5) :38-40.

    [6]Zhang Guoxiong, Zhang Defen.The optical plan for measuring center and radius of a ball part by 4-point method[J].Acta Metrologica Sinica, 1993, 14 (4) :247-250.

    [7]Zhang Z.Flexible camera calibration by viewing aplane from unknown orientations[C].Proceedings of the 7th International Conference on Computer Vision, 1999:6365272.

    [8]Zhang Z.Camera calibration with one-dimensional objects[J].IEEE Transactions on Pattern Analysis&Machine Intelligence, 2004, 26 (7) :892-899.

    [9]Kong Weiqi, Liu Jingnan, Da Feipeng, et al.Calibration method based on general imaging model for micro-object measurement system[J].Acta Optica Sinica, 2016, 36 (9) :0912003.

    [10]Lai Hanxuan, Zhang Zhengyu, Zhu Long, et al.Nonlinear distortion correction of camera based on linear characteristic[J].Laser&Optoelectronics Progress, 2016, 53 (2) :021502.

    [11]Fang Jiawei, Zhang Guoxiong, Qiu Zurong.Calibration system for surveying axis of non-contact laser probe[J].Electronic Measurement Technology, 2006, 29 (3) :160-161.

    [12]Lu Keqing, Wang Wen, Chen Zichen.Calibration of laser beam-direction for point laser sensors[J].Optics and Precision Engineering, 2010, 18 (3) :880-886.

    [13]Zhou Huicheng, Zeng Lizhan, Chen Jihong, et al.Calibration of light beam′s direction of point light source probe[J].Chinese Journal of Scientific Instrument, 2004, 25 (3) :388-391.

    [14]Zhang Jianhuan, Tan Jiubin.Theoretical analysis of surface slope measurement with a confocal microscope[J].Journal of Optoelectronics·Laser, 2002, 13 (12) :1272-1275.

    [15]National standardization technical committee.Angle block gauge GB3/T 22521-2008[S].Beijing:China Standard Press, 2009.

This Article

ISSN:0258-7025

CN: 31-1339/TN

Vol 44, No. 04, Pages 224-233

April 2017

Downloads:1

Share
Article Outline

摘要

  • 1 引言
  • 2 测量原理
  • 3 实验结果
  • 4 分析与讨论
  • 5 结论
  • 参考文献