Calibration Method for Optical Axis Perpendicular Error of Laser Sensor
(2.National Institute of Metrology of China, Beijing, China 100013)
【Abstract】The high-precision calibration of laser sensors in high-precision composite measuring machines is conducted. The calibration method of the optical axis perpendicular error angle by using the calibration block of double slopes with known base angles and the sine theorem is proposed. This method can avoid the errors from various directions caused by the non-perpendicular orientation between the optical axis of sensors and the worktable, which can effectively improve the measurement accuracy of this sensor and provide a basis for multi-sensor duplex measurement with higher accuracy.
【Keywords】 sensors; calibration of perpendicular error; fitted plane slope; optical axis; high-precision complex measurement;
 Singh P, Wu Y, Kaucic R, et al. Multimodal industrial inspection and analysis [J]. Journal of Computing & Information Science in Engineering, 2007, 7 (1): 102–107.
 Waurzyniak P. Multisensor systems ramp up-Faster processors, improved accuracy spur multisensor adoption [J]. Manufacturing Engineering, 2003, 130 (6): 61–68.
 Yang X G, Huang Y M, Gao F, et al. Research on calibration algorithm of analogue touch probe with nonorthogonal coordinate system [J]. Chinese Journal of Scientific Instrument, 2007, 28 (10): 1826–1830 (in Chinese).
 Zhu C G, Huang M Q. Calibration of Master Ball on Coordinate Measuring Machine [J]. Shanghai Measurement and Testing, 1995 (5): 25–27 (in Chinese).
 Luo Z. Calibration and Correct Use of 3D Trigger Type Probe [J]. Tool Engineering, 1992 (5): 38–40 (in Chinese).
 Zhang G X, Zhang D F. The optical plan for measuring center and radius of a ball part by 4-point method [J]. Acta Metrologica Sinica, 1993, 14 (4): 247–250 (in Chinese).
 Zhang Z. Flexible camera calibration by viewing aplane from unknown orientations [C]. Proceedings of the 7th International Conference on Computer Vision, 1999: 6365272.
 Zhang Z. Camera calibration with one-dimensional objects [J]. IEEE Transactions on Pattern Analysis & Machine Intelligence, 2004, 26 (7): 892–899.
 Kong W Q, Liu J N, Da F P, et al. Calibration method based on general imaging model for micro-object measurement system [J]. Acta Optica Sinica, 2016, 36 (9): 0912003 (in Chinese).
 Lai H X, Zhang Z Y, Zhu L, et al. Nonlinear distortion correction of camera based on linear characteristic [J]. Laser & Optoelectronics Progress, 2016, 53 (2): 021502 (in Chinese).
 Fang J W, Zhang G X, Qiu Z R. Calibration system for surveying axis of non-contact laser probe [J]. Electronic Measurement Technology, 2006, 29 (3): 160–161 (in Chinese).
 Lu K Q, Wang W, Chen Z C. Calibration of laser beam-direction for point laser sensors [J]. Optics and Precision Engineering, 2010, 18 (3): 880–886 (in Chinese).
 Zhou H C, Zeng L Z, Chen J H, et al. Calibration of light beam′s direction of point light source probe [J]. Chinese Journal of Scientific Instrument, 2004, 25 (3): 388–391 (in Chinese).
 Zhang J H, Tan J B. Theoretical analysis of surface slope measurement with a confocal microscope [J]. Journal of Optoelectronics·Laser, 2002, 13 (12): 1272–1275 (in Chinese).
 National standardization technical committee. Angle block gauge GB3/T 22521-2008 [S]. Beijing: China Standard Press, 2009.